Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Thermo Fisher Thermoflex 900 Recirculating Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Thermoflex 900 Recirculating ChillerThermo Fisher | |
|---|---|---|
| OEM | ABM | Thermo Fisher |
| Category | — | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Thermo Fisher Thermoflex 900 Recirculating Chiller |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[3] | Thermoflex 900[4] |
| Description | ROBOT[3] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[3] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[3] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[3] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[3] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[3] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[3] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[3] | — |
| Manufacturer | — | Thermo Scientific[4] |
| Type | — | Recirculating Chiller[4] |
| Cooling method | — | Air cooled only[1] |
| Pump configuration | — | P2 pump[1] |
| Pump performance | — | 4.0 gpm at 60 psig[1] |
| Cooling capacity | — | 900 W (3074 BTU) at 20°C[1] |
| Power requirement | — | 115 V / 60 Hz, single phase[1] |
| Reservoir volume | — | 7.2 liter (1.9 gallon)[1] |
| Set point temperature range | — | +5°C to +40°C[1] |
| Ambient temperature range | — | +10°C to +40°C[1] |
| Refrigerant | — | R134A, 19.0 oz[1] |
| Communications | — | RS232 ports on the back[2] |
| Compliances | — | SEMI S2 Compliant – S2-0703, S8-0705, S14-0704 & F47-0706[1] |