Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Pfeiffer TMH 071 P Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TMH 071 P VacuumPfeiffer | |
|---|---|---|
| OEM | ABM | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Pfeiffer TMH |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | TMH 071 P[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Oil | — | PM 073 073 -T[2] |
| Supply | — | 60 l/s[2] |
| Mass | — | 2.8 kg[2] |
| Manufacturer | — | Pfeiffer[2] |
| Asset # | — | 143047[2] |
| Vintage | — | 2020[2] |
| Pumping speed | — | 60 l/sec for N2[3] |
| Inlet flange | — | DN 63 ISO-K[3] |
| Compression ratio (N2) | — | > 10^11[5] |
| Ultimate pressure | — | < 7 x 10^-8 Torr[5] |
| Type | — | vacuum pump[4] |
| Controller | — | TC 100[6] |
| Part number | — | PMP03195 / PMC01692 / G3170-80061[6] |