Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Onto Innovation Nanospec 210, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Nanospec 210Onto Innovation | |
|---|---|---|
| OEM | ABM | Onto Innovation |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Onto Innovation Nanospec 210 |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | Nanospec 210[4] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Thickness Range | — | 100 to 500,000 angstroms[2] |
| Typical Measurement Time | — | 2.5 seconds[2] |
| Spot Size (5x objective) | — | 50 µm[2] |
| Spot Size (10x objective) | — | 25 µm[2] |
| Spot Size (40x objective) | — | 6.5 µm[2] |
| Resolution | — | 100 angstroms[3] |
| Reproducibility | — | 5Å ±5% depending on film type[2] |
| Film Types Measured | — | Oxide on Silicon, Nitride on Silicon, Negative Resist on Silicon, Polysilicon on Oxide, Negative Resist on Oxide, Nitride on Oxide, Polyimide on Silicon, Positive Resist on Silicon, Positive Resist on Oxide[2] |
| Reflectance Mode | — | Thick Films[2] |
| Manufacturer | — | Onto Innovation (formerly Nanometrics)[4] |