Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Leybold Turbovac 1000 C Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | Leybold |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Leybold Turbovac 1000 C Turbomolecular Vacuum |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Power In | — | 47V, AC 3,5A, 600 Hz[2] |
| Power Out | — | 36.000 min-1[2] |
| Frequency | — | 600 Hz[3] |
| Pumping Speed | — | 1000 L/s for N2[3] |
| Compression Ratio | — | > 10ª for N2 / H2[3] |
| Inlet Flange | — | ISO-160 / ISO-200 KF[3] |
| Foreline Flange | — | KF-25 or KF-40[3] |
| Operating Speed | — | ~ 36 000 rpm[3] |
| Cooling | — | water[3] |
| Pumping speed | — | 1000 L/s (N2)[3] |
| Compression ratio | — | > 10ª for N2 / H2[3] |
| Power input | — | 47V AC, 3.5A, 600 Hz[2] |
| Power output | — | 36,000 min-1[2] |