Comparison ledger
ABM -407B-1-S-CES293 Robot, Newport SMC 100 Series Motion Controller Driver, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | Newport |
| Category | — | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Newport SMC 100 Series Motion Controller Driver |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Command Set | — | 40+ intuitive, 2-letter ASCII commands[1] |
| Computer Interfaces | — | RS-232-C; USB compatible with external SMC-USB adapter[1] |
| Control Algorithm | — | Floating point digital PID loop with velocity and friction feed forward, 2kHz servo rate; backlash and hysteresis compensation[1] |
| Drive Type | — | DC servo motors in open or closed loop (CC model); Open-loop stepper motors control (PP model)[1] |
| ESP Compatibility | — | ESP Stage Detection[1] |
| Motion | — | Point-to-point motion with s-gamma motion profiler allowing acceleration and jerk time control[1] |
| Motor Control | — | CC model: 48 VDC @ 1.5 A rms, 3 A peak; PP model: 48 VDC @ 1.1 A rms per phase; 100 kHz PWM switching frequency[1] |
| Number of Axis | — | 1[1] |
| Interface | — | Two-color LED[1] |
| Dimensions | — | 33 H x 161 W x 140 D (mm)[1] |
| I/O | — | 4 TTL out; 4 TTL in; 1 analog input[1] |
| Software | — | Windows Utility program; LabVIEW drivers[1] |
| Features | — | Daisy-chain up to 31 Controllers[1] |
| Type | — | Single-axis motion controller/driver for DC or stepper motor[3] |
| Communication interfaces | — | RS232, USB (via RS232C to USB converter), RS485[3] |
| Max controllers in daisy chain | — | 31[3] |
| Power supply input | — | 100-240 VAC[3] |