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Comparison ledger

-407B-1-S-CES293 RobotversusCFT 75 Chiller

ABM -407B-1-S-CES293 Robot, Neslab CFT 75 Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMABMNeslab
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2009 service-business acquisition
Control system——
Generation——
FamilyABM -407B-1-S-CES293 RobotNeslab CFT 75 Chiller
Cited variants—
  • CFT75 (R134a)[1]
Specifications
ModelABM-407B-1-S-CES293[2]CFT 75[3]
DescriptionROBOT[2]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2]—
Make—Neslab[3]
Type—Recirculating chiller[1]
Refrigeration system—Air-cooled[1]
Phase—Single phase[4]
Temperature range—5C to 35C[4]
Flow rate at 20ºC / 30 PSI (PD2 Pump)—3.8 GPM[4]
Cooling capacity at 20C—2100 Watts[4]
Available voltage—200-230V 1 Ph[4]
Plumbing connections—1/2 inch NPT[1]
Cooling fluid—Tap water is the recommended fluid for operation.[1]
Cooling system—Air-cooled refrigeration system[1]
Cooling capacity—2100 watts at 20°C[4]
Power requirements—208/230V, 60Hz[1]
Reservoir volume—6.8 liters (1.8 gallons)[1]
Refrigerant—R134a[1]
Flow rate at 20°C / 30 PSI (PD1 Pump)—0.9 GPM[4]
Air intake required—800 cubic feet per minute[1]
Temperature stability—±0.5°[1]
Dimensions (H x W x D)—67.3 x 37.8 x 65.4 cm (26½ x 147/8 x 25¾ inches)[1]
Pump capacity—60 PSI / 30 Bar; flow 2.0 LPM (5 PSI) to 20 LPM (15-20 PSI) approx.[1]
Flow Rate at 20ºC / 30 PSI (PD1 Pump)—.9 GPM[4]
Cooling options—Air only[4]
Condenser—Air-cooled; air drawn in the front and discharged through rear and side[1]
Compliance—CE label; LVD 73/23/EEC; UL 3101-1:93; EMC 89/336/EEC EN 55011 Class A[1]
Fluid viscosity requirement—50 centistokes or less at lowest operating temperature[1]
Full rated capacity ambient temperature—Up to approximately +38°C[1]
Air intake requirement—Approximately 800 cubic feet per minute for full rated capacity[1]
OEM—Neslab[3]
Cooling configuration—Air only[4]
Unit dimensions (H x W x D)—67.3 x 37.8 x 65.4 cm[1]
Cooling fluid recommendation—Tap water[1]
Cooling type—Air cooled[1]
Cooling capacity at 20°C—2100 W[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]chillercity.comchillercity.com
  2. [2]dealer listingsemistarcorp.com
  3. [3]Equipment inventory listing
  4. [4]trilliumus.comtrilliumus.com