Waferpedia

Comparison ledger

-407B-1-S-CES293 RobotversusMPM 125

ABM -407B-1-S-CES293 Robot, MPM MPM 125, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMABMMPM
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyABM -407B-1-S-CES293 RobotMPM MPM 125
Cited variants—
Specifications
ModelABM-407B-1-S-CES293[2]—
DescriptionROBOT[2]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2]—
Maximum Board Size—609.6 mm x 508 mm (24" x 20")[3]
Minimum Board Size—50.8 mm x 50.8 mm (2" x 2")[3]
Board Thickness—0.2 mm (0.008") to 5.0 mm (0.20"), up to 6.0 mm (0.24") without top clamp[3]
Maximum Board Weight—4.5 kg (9.92 lbs)[3]
Underside Clearance—12.7 mm (0.5") standard, configurable for 25.4 mm (1.0")[3]
Maximum Print Area—609.6 mm x 508 mm (24" x 20")[3]
Print Gap—0 mm to 6.35 mm (0" to 0.25")[3]
Print Speed—Up to 305 mm/sec (12.0"/sec)[3]
Print Force—0 to 20 kg (0 lb to 44 lbs)[3]
Stencil Frame Size—737 mm x 737 mm (29" x 29")[3]
Vision Field-of-View—10.6 mm x 8.0 mm (0.417" x 0.315")[3]
Camera System—Single digital camera - patented look up/down vision[3]
Total System Alignment Accuracy—±12.5 microns at 6 sigma, Cpk >= 2.0[3]
Cycle Time—13 seconds[3]
Power Requirements—200 to 240 VAC single phase @50/60 Hz, 15 A[3]
Air Supply Requirements—100 psi at 4 cfm (standard) to 18 cfm (vacuum wipe) (7 bar @ 5 L/s to 12 L/s), 12.7 mm diameter line[3]
Machine Height—1,940 mm (37.0")[3]
Machine Depth—1,593.1 mm[3]
Machine Width—1,202.7 mm[3]
Machine Weight—816.5 kg[3]
Crated Weight—1110 kg[3]
Control Software—Benchmark software on Windows XP SP3[1]
Sources (3)Every fact above is drawn from these public sources
  1. [1]smtnet.comsmtnet.com
  2. [2]dealer listingsemistarcorp.com
  3. [3]anubiss.nlanubiss.nl