Comparison ledger
ABM -407B-1-S-CES293 Robot, Leybold Turbovac 50 Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Turbovac 50 TurboLeybold | |
|---|---|---|
| OEM | ABM | Leybold |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Leybold Turbovac 50 Turbo |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[3] | — |
| Description | ROBOT[3] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[3] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[3] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[3] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[3] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[3] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[3] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[3] | — |
| Pump Type | — | Turbomolecular pump with grease-lubricated bearings[2] |
| Nominal rotation speed | — | 72000 rpm[4] |
| Run-up time | — | 2 min[4] |
| Ultimate pressure | — | < 5 x 10⁻⁸ mbar[4] |
| Weight | — | 2.0 kg (4.4 lbs)[4] |
| Max. power consumption | — | 45 W[4] |
| Power consumption at ultimate pressure | — | 15 W[4] |
| Admissible ambient temperature | — | 10 to 55 °C / 50 to 131 °F[4] |
| Cooling | — | Standard convection; optional air/water[4] |
| Max. foreline pressure for N₂ | — | 1 x 10⁻¹ mbar (7.5 x 10⁻² Torr)[4] |
| Recommended foreline pump | — | TRIVAC D 2.5 E[4] |
| Pumping speed for N₂ (DN 40 inlet) | — | 33 l/s[4] |
| Pumping speed for N₂ (DN 63 inlet) | — | 55 l/s[4] |
| Gas throughput for N₂ (DN 40 inlet) | — | 0.90 mbar l/s[4] |
| Gas throughput for N₂ (DN 63 inlet) | — | 1.00 mbar l/s[4] |
| Compression ratio for N₂ | — | 2 x 10⁶[4] |
| Compression ratio for He | — | 5 x 10²[4] |
| Compression ratio for H₂ | — | 2 x 10²[4] |