Comparison ledger
ABM -407B-1-S-CES293 Robot, KLA Surfscan SP 1 DLS, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | KLA |
| Category | — | — |
| Wafer size | — | For Wafer Centering Device |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | KLA Surfscan |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | SP1 DLS[4] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Configuration | — | Upgraded/New[2] |
| Wafer size | — | For Wafer Centering Device[2] |
| Defect Sensitivity (Polished Bare Silicon) | — | 0.050 µm[3] |
| Laser Source | — | Argon Ion Laser (488 nm)[3] |
| Wafer Size Support | — | 200 mm and 300 mm[3] |
| Enhanced Rough Film Sensitivity | — | Yes[3] |
| Real Time Defect Classification (RTDC) | — | Yes[3] |
| Defect Map and Histogram with Zoom | — | Yes[3] |
| Map to Map | — | Yes[3] |
| Operator Interface | — | Yes[3] |
| Blower Unit | — | Yes[3] |
| OEM | — | KLA-Tencor[3] |
| Wafer Size | — | 200/300mm[3] |
| Defect Sensitivity | — | 0.050um on polished bare silicon[3] |
| Surface Type | — | Unpatterned[3] |
| Key Feature | — | Enhanced Rough Film Sensitivity[3] |
| Optional Handler | — | 300mm Single FOUP/FIMS Handler[3] |