Waferpedia

Comparison ledger

-407B-1-S-CES293 RobotversusDFD 6363

ABM -407B-1-S-CES293 Robot, Disco DFD 6363, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
-407B-1-S-CES293 RobotABM
DFD 6363Disco
OEMABMDisco
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyABM -407B-1-S-CES293 RobotDisco DFD 6363
Specifications
ModelABM-407B-1-S-CES293[1]—
DescriptionROBOT[1]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1]—
Max. workpiece size—ø300[2]
X-axis cutting range—310 mm[2]
Cutting speed—0.1 – 1,000 mm/s[2]
Y-axis cutting range—310 mm[2]
Index step—0.0001 mm[2]
Index positioning accuracy—0.002/310 (Single error) 0.002/5[2]
Z-axis max. stroke—14.7 mm (for ø2" blade) 14.9 mm (for ø3" blade)[2]
Z-axis moving resolution—0.0000002 mm[2]
Z-axis repeatability accuracy—0.001 mm[2]
θ-axis max. rotation angle—380 deg[2]
Spindle rated torque (1.8 kW)—0.29 N·m[2]
Spindle rated torque (High-speed rotation)—0.19 N·m[2]
Spindle revolution speed range (1.8 kW)—6,000 – 60,000 min⁻¹[2]
Spindle revolution speed range (High-speed rotation)—20,000 – 80,000 min⁻¹[2]
Machine dimensions (W x D x H)—1,200 x 1,550 x 1,800 mm[2]
Machine weight—Approx. 1,800 kg[2]
-407B-1-S-CES293 Robot entryDFD 6363 entryAsk about these tools →Share experience with this comparison →
Sources (2)Every fact above is drawn from these public sources
  1. [1]dealer listingsemistarcorp.com
  2. [2]discochina.comdiscochina.com